沖村 邦雄

Okimura Kunio

  • 教授
  • 学位:博士(工学)

基本情報

所属

  • Undergraduate School of Engineering / Department of Electrical and Electronic Engineering
  • Graduate School of Science and Technology / Course of Science and Technology
  • Graduate School of Engineering / Course of Electrical and Electronic Engineering

ジャンル

  • International Community

研究と関連するSDGs

  • Affordable and Clean Energy
  • Industry, Innovation and Infrastructure
  • Climate Action

詳細情報

研究キーワード

  • Electronic and Electric Materials Engineering

研究分野

  • Manufacturing technology (mechanical, electrical/electronic, chemical engineering) Electric/electronic material engineering
  • Nanotechnology/Materials Thin-film surfaces and interfaces

委員歴

  • 真空協会スパッタリング&プラズマプロセス部会委員(2006,June-)
  • 真空協会研究部会委員

受賞

  • Japan Society of Applied Physics Best Poster Award
  • SP Division of Vacuum Society of Japan Best Poster Award on 14th International Symposium on Sputtering & Plasma Processes (ISSP) Growth of VO2 thin films on transparent conductive Al-doped ZnO films on glass substrates
  • Japan Society of Applied Physics Best Poster Award
  • Best Poster Award (First Place)on IUMRS-ICAM in Jeju
  • Best Poster Award on IUMRS-ICAM in Jeju
  • Best Poster Award on ISSP2015 in Kyoto
  • Best Poster Award on IUMRS-ICAM in Taiwan
  • Best Paper Award in IUMRS-ICA-2006, held in Korea

論文

Approaching ultrathin VO2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching

Stress-Induced In Situ Modification of Transition Temperature in VO2 Films Capped by Chalcogenide

Broadband operation of active terahertz quarter-wave plate achieved with vanadium-dioxide-based metasurface switchable by current injection

Coupled oscillations of VO2-based layered structures: Experiment and simulation approach

Simultaneous realization of infrared-light switching and high visible-light transmittance in extremely thin VO2 films grown on ZnO-nanorods buffered glasses

Broadband helicity switching for terahertz waves using anisotropically deformed checkerboard metasurface with vanadium dioxide

Self-oscillation Phenomena of Vanadium Dioxide Films Based on Their Insulator-Metal Transition

Persistent M2 phase in strongly strained (011)-oriented grains in VO2 films grown on sapphire (001) in reactive sputtering

Reconfigurable Terahertz Quarter-Wave Plate for Helicity Switching Based on Babinet Inversion of an Anisotropic Checkerboard Metasurface

Infrared-light switching in highly oriented VO2 films on ZnO-buffered glasses with controlled phase transition temperatures

Impact of (111)-oriented TiN conductive layers for the growth of vanadium dioxide films and the effect of grain boundary diffusions

Low-temperature growth of VO2 films on transparent ZnO/glass and Al-doped ZnO/glass and their optical transition properties

Role of strain and oxygen vacancies in modifying the transition temperature of VO2 films deposited via Rf biased sputtering

Recrystallization of VO2 films into (011)-oriented micrometer-sized grains on Al2O3 (001) in biased reactive sputtering

Comparative study of TiN and TiN/Ti as bottom electrodes for layered type devices with phase transition VO2 films

Fabrication of amorphous silicon nitride thin films by radio-frequency sputtering assisted by an inductively coupled plasma

Oriented growth of VO2(B) thin films for lithium ion batteries

Anisotropic Babinet-Invertible Metasurfaces to Realize Transmission-Reflection Switching for Orthogonal Polarizations of Light

Dynamically Babinet-invertible metasurface: a capacitive-inductive reconfigurable filter for terahertz waves using vanadium-dioxide metal-insulator transition

Large modification in insulator-metal transition of VO2 films grown on Al2O3 (001) by high energy ion irradiation in biased reactive sputtering

共同研究・競争的資金等の研究課題

Preparation of thin films by sputtering method

Study on Inductively Coupled Plasmas

Preparation of Thin Films by Plasma CVD.

Preparation of Thin Films by Magnetron Sputtering

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